Nanostructured article

A nanostructured article having a first layer with a nanostructured surface is described. The nanostructured surface includes a plurality of pillars extending from a base surface of the first layer. The pillars have an average height greater than an average lateral dimension of the pillars. An avera...

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Hauptverfasser:	Sun, Xiaoguang, Freier, David G, Nirmal, Manoj, Meyer, Justin P, Luo, Hui, Rowe, David J, Sykora, Haeen, David, Moses M, Chien, Bert T, Nelson, Jilliann M, Brott, Robert L, Carpenter, Samuel J, Lechuga, Hyacinth L, Erickson, Nicholas C
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A nanostructured article having a first layer with a nanostructured surface is described. The nanostructured surface includes a plurality of pillars extending from a base surface of the first layer. The pillars have an average height greater than an average lateral dimension of the pillars. An average center-to-center spacing between pillars is no more than 2000 nm. The average lateral dimension is no less than 50 nm. Each pillar in the plurality of pillars has at least a lower portion and an upper portion where the lower portion is between the upper portion and the base surface, and the upper and lower portions have differing compositions. The nanostructured article includes a second layer disposed over the plurality of pillars and extending continuously to the base surface.