Optical-scanning-height measuring device

To provide an optical-scanning-height measuring device capable of efficiently measuring a shape of a desired portion of a measurement object. Designation of a measurement point on an image of a measurement object S is received. Light emitted from a light emitting section 231 is deflected by the defl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Homma, Tatsuro, Satoyoshi, Hiroyuki, Sugino, Kimihiko
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	To provide an optical-scanning-height measuring device capable of efficiently measuring a shape of a desired portion of a measurement object. Designation of a measurement point on an image of a measurement object S is received. Light emitted from a light emitting section 231 is deflected by the deflecting section and irradiated on the measurement object S. The deflecting section is controlled to irradiate the light on a portion of the measurement object S corresponding to the measurement point. A deflecting direction of the deflecting section or an irradiation position of the light deflected by the deflecting section is detected. Height of the portion of the measurement object S corresponding to the measurement point is calculated on the basis of the deflecting direction of the deflecting section or the irradiation position of the light deflected by the deflecting section and the light reception signal output by the light receiving section.