Micromechanical spring for a sensor element

A micromechanical spring for a sensor element, including at least two spring sections formed along a sensing axis, the at least two spring sections each having a defined length, and the at least two spring sections having different defined widths.

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Bibliographische Detailangaben
Hauptverfasser:	Koster, Monika, Eid, Rudy
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A micromechanical spring for a sensor element, including at least two spring sections formed along a sensing axis, the at least two spring sections each having a defined length, and the at least two spring sections having different defined widths.