Ion implantation amount adjustment device and method, ion implantation apparatus and determination method

Ion implantation amount adjustment device and method, ion implantation apparatus and determination method

The present disclosure relates to an ion implantation amount adjustment device that includes: an adjuster configured to turn on or off an ion outlet of the ion implantation apparatus; and an actuator configured to control movement of the adjuster to adjust an opening degree of the ion outlet.

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Bibliographische Detailangaben
Hauptverfasser: Fu, Yongyi, Liu, Chenliang, Luo, Kang, Jing, Hao, Li, Rujian, Kang, Dongwoo
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:The present disclosure relates to an ion implantation amount adjustment device that includes: an adjuster configured to turn on or off an ion outlet of the ion implantation apparatus; and an actuator configured to control movement of the adjuster to adjust an opening degree of the ion outlet.