Thermal sensing acoustic wave resonator and acoustic wave filter having thermal sensing acoustic wave resonator

An acoustic wave filter having thermal sensing acoustic wave resonator comprises a substrate, a plurality of series acoustic wave resonators formed on the substrate, at least one shunt acoustic wave resonator formed on the substrate and a thermal sensing acoustic wave resonator. The thermal sensing...

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Bibliographische Detailangaben
Hauptverfasser: Chou, Tung-Yao, Chiang, Chih-Feng, Huang, Fan Hsiu, Lin, Cheng Kuo, Tsai, Shu Hsiao, Lin, Re Ching
Format: Patent
Sprache:eng
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Zusammenfassung:An acoustic wave filter having thermal sensing acoustic wave resonator comprises a substrate, a plurality of series acoustic wave resonators formed on the substrate, at least one shunt acoustic wave resonator formed on the substrate and a thermal sensing acoustic wave resonator. The thermal sensing acoustic wave resonator is one of a series acoustic wave resonator and a shunt acoustic wave resonator. Thereby the thermal sensing acoustic wave resonator plays dual roles of thermal sensing and acoustic wave filtering.