Inspection substrate and an inspection method

An inspection substrate for inspecting a component, such as a liquid confinement system, of an apparatus for processing production substrates is discussed. The inspection substrate includes a body having dimensions similar to a production substrate so that the inspection substrate is compatible with...

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Bibliographische Detailangaben
Hauptverfasser:	Wouters, Marijn, Eummelen, Erik Henricus Egidius Catharina, Migchelbrink, Ferdy, Tanasa, Gheorghe, Keukens, Floor Lodewijk, Yu, Miao, Van Sommeren, Daan Daniel Johannes Antonius, Ras, Arnoldus Johannes Martinus Jozeph, Gattobigio, Giovanni Luca, Raaymakers, Jeroen Arnoldus Leonardus Johannes, Van De Winkel, Jimmy Matheus Wilhelmus, Arts, Petrus Martinus Gerardus Johannes, Buddenberg, Harold Sebastiaan, Saeed, Seerwan
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	An inspection substrate for inspecting a component, such as a liquid confinement system, of an apparatus for processing production substrates is discussed. The inspection substrate includes a body having dimensions similar to a production substrate so that the inspection substrate is compatible with the apparatus, an illumination device, such as light emitting diodes, embedded in the body, a sensor, such as an imaging device or a pressure sensor, that is embedded in the body and configured to generate inspection information, such as image data, relating to a parameter of the component of the apparatus proximate to the inspection substrate, and a storage device embedded in the body and configured to store the inspection information.