Crosslinkable elastomer composition, molded article, seal member, plasma treatment apparatus and semiconductor manufacturing apparatus including said seal member, and agent for decreasing hardness of molded article, method for producing molded article

The present invention addresses the problem of reducing the hardness of a molded article obtained by cross-linking a cross-linking elastomer. The problem addressed by the present invention is solved by cross-linking a cross-linking elastomer composition including at least a cross-linking elastomer a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Shimizu, Tomoya, Kuboyama, Takeshi, Otani, Kojiro
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES CHEMISTRY COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS DYES MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS ORGANIC MACROMOLECULAR COMPOUNDS PAINTS POLISHES THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	The present invention addresses the problem of reducing the hardness of a molded article obtained by cross-linking a cross-linking elastomer. The problem addressed by the present invention is solved by cross-linking a cross-linking elastomer composition including at least a cross-linking elastomer and a fluorine oligomer (a) not including hydrogen.