Multifunctional substrate inspection apparatus and multifunctional substrate inspection method

Provided is a multifunctional substrate inspection apparatus capable of selectively bringing probes into contact. The apparatus is provided with first and second probe bases 100, 200 to which probes 111-217 having different lengths and capable of contacting surfaces 10, 20 of a substrate 30, driving device 50 increasing and decreasing an interval between the first and second probe base 100, 200, an intermediate plate 300 capable of carrying the substrate 30 between the first and second probe bases 100, 200, a first extendable pole or equivalent support mechanism attached to the first probe base 100 and capable of pressing the substrate 30 with a biasing force F1 based on a driving force F of the driving device 50 transmitted via first biasing device 61, second biasing device 42 for urging the substrate 30 to be inspected away from the intermediate plate 300, and third biasing device 43 for urging the intermediate plate 300 away from the second probe base 200, the probes 111-217 being selectively brought into contact with the substrate 30 according to their different lengths.