Metal contamination inhibitor, metal contamination inhibition membrane, method for preventing metal contamination, and method for cleaning product

The present invention reduces adhesion of trace metals in ultrapure water for cleaning products, and inhibits the metal contamination of an object to be cleaned. Provided is a metal contamination inhibitor that contains a polymer having an ion-exchange group, such as a polystyrene sulfonate having a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Morita, Hiroshi, Hoshi, Shigeyuki, Kato, Toshimasa
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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Beschreibung
Zusammenfassung:	The present invention reduces adhesion of trace metals in ultrapure water for cleaning products, and inhibits the metal contamination of an object to be cleaned. Provided is a metal contamination inhibitor that contains a polymer having an ion-exchange group, such as a polystyrene sulfonate having a molecular weight of at least 100,000. Trace metals in ultrapure water are adsorbed through an ion-exchange reaction of the polymer having the ion-exchange group, and can thus be inhibited from adhering to products. Also provided is a method for cleaning a product with ultrapure water to which the metal contamination inhibitor has been added. Preferably, the ultrapure water to which the metal contamination inhibitor has been added flows through a separation membrane module, and the products are cleaned with permeated water.