Method and device for plasma treatment of substrates

A device for bombarding at least one substrate with a plasma with a first electrode and a second electrode that can be arranged opposite thereto, which electrodes are formed together producing the plasma between the electrodes wherein at least one of the electrodes is formed from at least two electr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Glinsner, Thomas, Nones, Alexander, Schmid, Florian, Bernauer, Johann, Anzengruber, Roman, Plach, Thomas, Wagenleitner, Thomas, Wieser, Thomas, Kriebisch, Uwe, Flotgen, Christoph
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A device for bombarding at least one substrate with a plasma with a first electrode and a second electrode that can be arranged opposite thereto, which electrodes are formed together producing the plasma between the electrodes wherein at least one of the electrodes is formed from at least two electrode units. In addition, this invention relates to a corresponding method.