Probe systems for testing a device under test

Probe systems for testing a device under test are disclosed herein. The probe systems include a platen that defines an upper surface, an opposed lower surface, and a platen aperture. The probe systems also include a chuck that defines a support surface configured to support a device under test. The...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Storm, Christopher, Negishi, Kazuki, Simmons, Michael E, Lord, Anthony, Fisher, Gavin Neil, Bolt, Bryan Conrad
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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