Probe systems for testing a device under test

Probe systems for testing a device under test are disclosed herein. The probe systems include a platen that defines an upper surface, an opposed lower surface, and a platen aperture. The probe systems also include a chuck that defines a support surface configured to support a device under test. The...

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Bibliographische Detailangaben
Hauptverfasser: Storm, Christopher, Negishi, Kazuki, Simmons, Michael E, Lord, Anthony, Fisher, Gavin Neil, Bolt, Bryan Conrad
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Probe systems for testing a device under test are disclosed herein. The probe systems include a platen that defines an upper surface, an opposed lower surface, and a platen aperture. The probe systems also include a chuck that defines a support surface configured to support a device under test. The probe systems further include a lower enclosure extending from the lower surface of the platen and an upper enclosure extending from the upper surface of the platen. The upper enclosure includes a side wall that defines a side wall aperture, and the side wall and the platen define an intersection angle of at least 30 degrees and at most 60 degrees. The probe systems also include a manipulator, a probe shaft arm, a probe assembly, a test head, and an electrical conductor.