Variable resistance memory stack with treated sidewalls

Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming a memory stack out of a plurality of elements. A sidewall liner is formed on a sidewall of the memory stack using a physical vapor deposition (PVD) process, including an adhesion species a...

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Bibliographische Detailangaben
Hauptverfasser: McTeer, Everett Allen, Hu, Yongjun Jeff, Petz, Christopher W, Chan, Tsz W
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming a memory stack out of a plurality of elements. A sidewall liner is formed on a sidewall of the memory stack using a physical vapor deposition (PVD) process, including an adhesion species and a dielectric, such that the adhesion species intermixes with an element of the memory stack to terminate unsatisfied atomic bonds of the element and the dielectric forms a dielectric film with the adhesive species on the sidewall.