Automated detection of artifacts in scan image

A method of analyzing an atomic force microscope image includes receiving data related to an atomic force microscope image, where the data includes at least a first channel of data and a second channel of data relating to a first and second image data type. The method also includes identifying at le...

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Bibliographische Detailangaben
Hauptverfasser:	Prakash, Ramprasath A, Chen, Zhiyu
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	A method of analyzing an atomic force microscope image includes receiving data related to an atomic force microscope image, where the data includes at least a first channel of data and a second channel of data relating to a first and second image data type. The method also includes identifying at least a first location of high contrast within the image using the first image data type using edge detection and identifying a first artifact within the image based on the identified first location of high contrast. The method also includes accessing the second image data type corresponding to the identified first location of the first artifact and determining a type of the first artifact by comparing the first image data type with the second image data type relating to the identified location of the first artifact.