Epitaxial structure of Ga-face group III nitride, active device, and method for fabricating the same

The present invention provides an epitaxial structure of Ga-face group III nitride, its active device, and the method for fabricating the same. The epitaxial structure of Ga-face AlGaN/GaN comprises a substrate, a Buffer layer (C-doped) on the substrate, an i-GaN (C-doped) layer on the Buffer layer (C-doped), an i-Al(y)GaN buffer layer on the i-GaN (C-doped) layer, an i-GaN channel layer on the i-Al(y)GaN buffer layer, and an i-Al(x)GaN layer on the i-GaN channel layer, where x=0.1˜0.3 and y=0.05˜0.75. By using the p-GaN inverted trapezoidal gate or anode structure in device design, the 2DEG in the epitaxial structure of Ga-face group III nitride below the p-GaN inverted trapezoidal structure will be depleted, and thus fabricating p-GaN gate enhancement-mode (E-mode) AlGaN/GaN high electron mobility transistors (HEMTs), p-GaN anode AlGaN/GaN Schottky barrier diodes (SBDs), or hybrid devices.