Piezoelectric film transfer for acoustic resonators and filters
A method for forming an acoustic resonator comprising: forming a piezoelectric material on a first substrate; and applying the piezoelectric material to a second substrate on which the acoustic resonator is fabricated upon.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method for forming an acoustic resonator comprising: forming a piezoelectric material on a first substrate; and applying the piezoelectric material to a second substrate on which the acoustic resonator is fabricated upon. |
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