Piezoelectric film transfer for acoustic resonators and filters

A method for forming an acoustic resonator comprising: forming a piezoelectric material on a first substrate; and applying the piezoelectric material to a second substrate on which the acoustic resonator is fabricated upon.

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Bibliographische Detailangaben
Hauptverfasser: Houng, Yu-Min, Riaziat, Majid
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A method for forming an acoustic resonator comprising: forming a piezoelectric material on a first substrate; and applying the piezoelectric material to a second substrate on which the acoustic resonator is fabricated upon.