Substrate carrier and substrate carrier stack

A substrate carrier stack includes substrate carriers of only one type which are stacked or stackable on each other and carry a respective plate-shaped substrates within an inner accommodation space of the substrate carrier stack. The substrate carriers each include positioning formations. Positioni...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Wohanka, Christian, Schober, Thomas, Fenner, Yves, Fiddes, John, Rahrbach, Bernd, Dovids, Gerhard
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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