Substrate carrier and substrate carrier stack

A substrate carrier stack includes substrate carriers of only one type which are stacked or stackable on each other and carry a respective plate-shaped substrates within an inner accommodation space of the substrate carrier stack. The substrate carriers each include positioning formations. Positioni...

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Bibliographische Detailangaben
Hauptverfasser: Wohanka, Christian, Schober, Thomas, Fenner, Yves, Fiddes, John, Rahrbach, Bernd, Dovids, Gerhard
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A substrate carrier stack includes substrate carriers of only one type which are stacked or stackable on each other and carry a respective plate-shaped substrates within an inner accommodation space of the substrate carrier stack. The substrate carriers each include positioning formations. Positioning formations of each pair of an upper substrate carrier and a lower substrate carrier are mutually engaged or engageable, if the upper substrate carrier and the lower substrate carrier are properly positioned relative to each other.