Substrate carrier and substrate carrier stack

A substrate carrier stack includes substrate carriers of only one type which are stacked or stackable on each other and carry a respective plate-shaped substrates within an inner accommodation space of the substrate carrier stack. The substrate carriers each include positioning formations. Positioni...

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Hauptverfasser: Wohanka, Christian, Schober, Thomas, Fenner, Yves, Fiddes, John, Rahrbach, Bernd, Dovids, Gerhard
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creator Wohanka, Christian
Schober, Thomas
Fenner, Yves
Fiddes, John
Rahrbach, Bernd
Dovids, Gerhard
description A substrate carrier stack includes substrate carriers of only one type which are stacked or stackable on each other and carry a respective plate-shaped substrates within an inner accommodation space of the substrate carrier stack. The substrate carriers each include positioning formations. Positioning formations of each pair of an upper substrate carrier and a lower substrate carrier are mutually engaged or engageable, if the upper substrate carrier and the lower substrate carrier are properly positioned relative to each other.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Substrate carrier and substrate carrier stack
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