Active mechanical-environmental-thermal MEMS device for nanoscale characterization

A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Galambos, Paul C, Mook, William, Jungjohann, Katherine L, Chisholm, Claire, Leenheer, Andrew Jay, Shaw, Michael, Hearne, Sean J, Hattar, Khalid M
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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