Active mechanical-environmental-thermal MEMS device for nanoscale characterization

Active mechanical-environmental-thermal MEMS device for nanoscale characterization

A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Galambos, Paul C, Mook, William, Jungjohann, Katherine L, Chisholm, Claire, Leenheer, Andrew Jay, Shaw, Michael, Hearne, Sean J, Hattar, Khalid M
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.