Thin film transistor array panel

A thin film transistor array panel includes a substrate, a gate insulating layer, an interface layer, and a semiconductor layer. The gate insulating layer is disposed on the substrate. The interface layer is disposed on the gate insulating layer. The semiconductor layer is disposed on the interface...

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Hauptverfasser: Joo, Young Cheol, Moon, Ji Young, Kim, Jong Woo, Cho, Yoon Hyeung, Park, Eun-Kil, Lee, Seung Jae, Ha, Jae Heung, Kim, Hyeong Joon, Han, Sang Jin, Oh, Min Ho
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creator Joo, Young Cheol
Moon, Ji Young
Kim, Jong Woo
Cho, Yoon Hyeung
Park, Eun-Kil
Lee, Seung Jae
Ha, Jae Heung
Kim, Hyeong Joon
Han, Sang Jin
Oh, Min Ho
description A thin film transistor array panel includes a substrate, a gate insulating layer, an interface layer, and a semiconductor layer. The gate insulating layer is disposed on the substrate. The interface layer is disposed on the gate insulating layer. The semiconductor layer is disposed on the interface layer. The interface layer includes a fluorinated silicon oxide. The semiconductor layer includes a p-type oxide semiconductor material.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Thin film transistor array panel
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