Thin film transistor array panel
A thin film transistor array panel includes a substrate, a gate insulating layer, an interface layer, and a semiconductor layer. The gate insulating layer is disposed on the substrate. The interface layer is disposed on the gate insulating layer. The semiconductor layer is disposed on the interface...
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creator | Joo, Young Cheol Moon, Ji Young Kim, Jong Woo Cho, Yoon Hyeung Park, Eun-Kil Lee, Seung Jae Ha, Jae Heung Kim, Hyeong Joon Han, Sang Jin Oh, Min Ho |
description | A thin film transistor array panel includes a substrate, a gate insulating layer, an interface layer, and a semiconductor layer. The gate insulating layer is disposed on the substrate. The interface layer is disposed on the gate insulating layer. The semiconductor layer is disposed on the interface layer. The interface layer includes a fluorinated silicon oxide. The semiconductor layer includes a p-type oxide semiconductor material. |
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title | Thin film transistor array panel |
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