Transistors with dual gate conductors, and associated methods

A lateral double-diffused metal-oxide-semiconductor (LDMOS) transistor includes a silicon semiconductor structure and a vertical gate. The vertical gate includes (a) a first gate conductor and a second gate conductor each extending from a first outer surface of the silicon semiconductor structure in...

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Bibliographische Detailangaben
Hauptverfasser: Ni, Chi-Nung, Fatemizadeh, Badredin, Castro, Tom K, Zuniga, Marco A, Brand, Adam, Singh, Rajwinder, Xia, John, Xu, Min
Format: Patent
Sprache:eng
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Zusammenfassung:A lateral double-diffused metal-oxide-semiconductor (LDMOS) transistor includes a silicon semiconductor structure and a vertical gate. The vertical gate includes (a) a first gate conductor and a second gate conductor each extending from a first outer surface of the silicon semiconductor structure into the silicon semiconductor structure in a thickness direction, (b) a first separation dielectric layer separating the first gate conductor from the second gate conductor within the vertical gate, and (c) a gate dielectric layer separating each of the first gate conductor and the second gate conductor from the silicon semiconductor structure.