Compact radiation detector

Apparatus for detecting radiation includes a sensor medium disposed within a cavity in a silicon-based substrate. An electrode arrangement is provided for collecting charge generated within the sensor medium by interactions with impinging radiation and drifted through the sensor medium. The electrod...

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Bibliographische Detailangaben
Hauptverfasser: Galambos, Paul C, Renzi, Ronald F, Derzon, Mark S, Kay, Randolph R, Claus, Liam D
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Apparatus for detecting radiation includes a sensor medium disposed within a cavity in a silicon-based substrate. An electrode arrangement is provided for collecting charge generated within the sensor medium by interactions with impinging radiation and drifted through the sensor medium. The electrode arrangement is constituted, in part, by a silicon portion of the substrate that is doped to increase its electrical conductivity and that defines part of the cavity wall.