Diamond substrate

The crystal plane in the interior of the diamond substrate has a curvature higher than 0 km−1 and equal to or lower than 1500 km1 by preparing a base substrate, forming a plurality of pillar-shaped diamonds formed of diamond single crystals on one side of the base substrate, causing diamond single c...

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Bibliographische Detailangaben
Hauptverfasser: Kim, Seongwoo, Aida, Hideo, Koyama, Koji, Ikejiri, Kenjiro
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The crystal plane in the interior of the diamond substrate has a curvature higher than 0 km−1 and equal to or lower than 1500 km1 by preparing a base substrate, forming a plurality of pillar-shaped diamonds formed of diamond single crystals on one side of the base substrate, causing diamond single crystals to grow from tips of each pillar-shaped diamond, coalescing each of the diamond single crystals grown from the tips of each pillar-shaped diamond to form a diamond substrate layer, separating the diamond substrate layer from the base substrate, and manufacturing the diamond substrate from the diamond substrate layer.