Structure

A structure includes a polycrystalline substance of yttrium fluoride, wherein an average crystallite size in the polycrystalline substance is less than 100 nanometers. When taking a peak intensity detected near diffraction angle 2θ=24.3° by X-ray diffraction as α, and taking a peak intensity detecte...

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Bibliographische Detailangaben
Hauptverfasser: Ashizawa, Hiroaki, Kiyohara, Masakatsu
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A structure includes a polycrystalline substance of yttrium fluoride, wherein an average crystallite size in the polycrystalline substance is less than 100 nanometers. When taking a peak intensity detected near diffraction angle 2θ=24.3° by X-ray diffraction as α, and taking a peak intensity detected near diffraction angle 2θ=25.7° as β, a peak intensity ratio α/β of the structure is not less than 0% and less than 100%.