Pressure sensor capsule

A pressure sensor capsule includes a capsule body, an isolator, a pressure sensor, and a fluid fill pathway. The capsule body defines a process chamber. The isolator is supported by the capsule body and is exposed to the process chamber. The pressure sensor produces a sensor output that is indicativ...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Strei, David Matthew, Andrew, David Alexander, Haywood, Nicholas John
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A pressure sensor capsule includes a capsule body, an isolator, a pressure sensor, and a fluid fill pathway. The capsule body defines a process chamber. The isolator is supported by the capsule body and is exposed to the process chamber. The pressure sensor produces a sensor output that is indicative of a pressure within an interior chamber, which is isolated from the process chamber by the isolator. The fluid fill pathway extends from the process chamber to the interior chamber.