Bearing device and ion implantation device

A bearing device and an ion implantation device are provided. The bearing device includes a bearing table configured to bear a substrate, and a plurality of supporting components configured to support the substrate, each supporting component is movably arranged on the bearing table, to support the s...

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Bibliographische Detailangaben
Hauptverfasser:	Liu, Chenliang, Fu, Yongyi, Li, Fei, Luo, Kang, Xie, Yin, Tan, Chao, Li, Rujian, Jiang, Donghua, Wang, Xuewei, Ling, Yongzhou, Yang, Jianbo
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS BEARINGS BLASTING CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS FRAMES, CASINGS, OR BEDS OF ENGINES OR OTHER MACHINES ORAPPARATUS NOT SPECIFIC TO AN ENGINE, MACHINE, OR APPARATUSPROVIDED FOR ELSEWHERE GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HOLOGRAPHY LIGHTING MATERIALS THEREFOR MECHANICAL ENGINEERING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS ROTARY BODIES OTHER THAN GEARING ELEMENTS SEMICONDUCTOR DEVICES SHAFTS STANDS OR SUPPORTS THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	A bearing device and an ion implantation device are provided. The bearing device includes a bearing table configured to bear a substrate, and a plurality of supporting components configured to support the substrate, each supporting component is movably arranged on the bearing table, to support the substrate at an adjustable position.