Temperature probe

A temperature probe for use in a chamber. The temperature probe includes a hollow standoff mounted on a floor of the chamber, and equipped with a side-hole. The temperature probe further includes a cap fixed to the top of the standoff. The bottom surface of the cap includes a coating. The temperature probe also includes a light pipe disposed perpendicularly to the standoff and a shield disposed around the light pipe. A top surface of the cap is co-planar with a bottom surface of an object whose temperature is being measured. A sensing end of the light pipe is inserted into the side-hole of the standoff. An opening in the shield allows transmission of light between the sensing end of the light pipe and the coating. The light pipe and the shield pass through a feed-through in a sidewall of the chamber.