Liquid supply system
A liquid supply system providing a stable pump operation even when ultra-low temperature liquid including slurry is set as a liquid feed target. The liquid supply system that supplies ultra-low temperature liquid including a slurry component by expansion and contraction of bellows 41 and 42. At leas...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A liquid supply system providing a stable pump operation even when ultra-low temperature liquid including slurry is set as a liquid feed target. The liquid supply system that supplies ultra-low temperature liquid including a slurry component by expansion and contraction of bellows 41 and 42. At least a region in the bellows 41 and 42 that is in contact with the liquid is coated with resin having a low temperature brittle temperature that is equal to or lower than an operating temperature of the liquid supply system. |
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