Liquid supply system

A liquid supply system providing a stable pump operation even when ultra-low temperature liquid including slurry is set as a liquid feed target. The liquid supply system that supplies ultra-low temperature liquid including a slurry component by expansion and contraction of bellows 41 and 42. At leas...

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Bibliographische Detailangaben
Hauptverfasser: Osawa, Yoshio, Furuta, Kiyotaka, Mori, Koichi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A liquid supply system providing a stable pump operation even when ultra-low temperature liquid including slurry is set as a liquid feed target. The liquid supply system that supplies ultra-low temperature liquid including a slurry component by expansion and contraction of bellows 41 and 42. At least a region in the bellows 41 and 42 that is in contact with the liquid is coated with resin having a low temperature brittle temperature that is equal to or lower than an operating temperature of the liquid supply system.