Connection arrangement for a force-fit connection between ceramic components

A connection arrangement is provided for a force-fit connecting ceramic components for a lithography apparatus. The connection arrangement includes first and a second ceramic components and a clamping device. The clamping device directly clamps the first and the second ceramic component against one...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Deufel, Peter, Kulitzki, Viktor, Gellrich, Bernhard, Xalter, Stefan, Siegmanski, Karsten
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A connection arrangement is provided for a force-fit connecting ceramic components for a lithography apparatus. The connection arrangement includes first and a second ceramic components and a clamping device. The clamping device directly clamps the first and the second ceramic component against one another in a force-fit manner.