Nozzle-type electron beam irradiation device, and electron beam sterilization equipment equipped with same

A nozzle-type electron beam irradiation device includes a vacuum chamber, an electron beam generator disposed in the vacuum chamber, and a vacuum nozzle that is connected to the vacuum chamber so as to guide an electron beam from the electron beam generator and emit the electron beam to the outside....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Daiku, Hiroyuki, Noda, Takeshi, Sakai, Ichiro
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A nozzle-type electron beam irradiation device includes a vacuum chamber, an electron beam generator disposed in the vacuum chamber, and a vacuum nozzle that is connected to the vacuum chamber so as to guide an electron beam from the electron beam generator and emit the electron beam to the outside. The nozzle-type electron beam irradiation device includes a high-vacuum pump capable of sucking gas from the vicinity of the connecting part of the vacuum nozzle in the vacuum chamber.