Large load-bearing guide mechanism and multi-DOF large-stroke high-precision motion platform system
The present invention also discloses a multi-DOF (Degree of Freedom) large-stroke high-precision motion platform system using the guide mechanism. A large load-bearing guide mechanism comprises: a rigid frame for generating a large-stroke displacement to realize high-speed motion; a core motion plat...
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Zusammenfassung: | The present invention also discloses a multi-DOF (Degree of Freedom) large-stroke high-precision motion platform system using the guide mechanism. A large load-bearing guide mechanism comprises: a rigid frame for generating a large-stroke displacement to realize high-speed motion; a core motion platform connected with a motion portion of a non-contact actuator, connected with the rigid frame by a primary flexible hinge group and a secondary flexible hinge group, and used for generating a small-stroke precise displacement by elastic deformation of the flexible hinge groups under driving of the actuator. |
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