Method for treatment of hexachlorodisilane and hydrolyzed product

A method for treatment of a hexachlorodisilane and its hydrolyzed product is disclosed. It comprises adding a hexachlorodisilane or its hydrolyzed product into a sulfuric acid solution for reaction.

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Bibliographische Detailangaben
Hauptverfasser:	Chen, Jenq-Renn, Lin, Yu-Jhen, Liu, Chien-Ho, Wang, Cheng-Chieh, Ngai, Eugene Yin, Chin, Mo-Geng, Tsai, Hsiao-Yun
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A method for treatment of a hexachlorodisilane and its hydrolyzed product is disclosed. It comprises adding a hexachlorodisilane or its hydrolyzed product into a sulfuric acid solution for reaction.