MEMS capacitive sensor

A MEMS capacitive sensor is disclosed. In an embodiment a MEMS capacitive sensor includes a capacitor having a variable capacitance, wherein the capacitor includes a backplate and a membrane being separated from each other by a variable distance, wherein the capacitor is arranged on a substrate, an...

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Bibliographische Detailangaben
Hauptverfasser:	Hanzlik, Tomasz, Rocca, Gino
Format:	Patent
Sprache:	eng
Schlagworte:	AMPLIFIERS BASIC ELECTRONIC CIRCUITRY DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	A MEMS capacitive sensor is disclosed. In an embodiment a MEMS capacitive sensor includes a capacitor having a variable capacitance, wherein the capacitor includes a backplate and a membrane being separated from each other by a variable distance, wherein the capacitor is arranged on a substrate, an output terminal configured to provide an output signal, wherein the output terminal is connected to the backplate, a bias voltage input terminal configured to apply a bias voltage, wherein the bias voltage input terminal is connected to the membrane and a supply voltage input terminal configured to apply a supply voltage, wherein the supply voltage input terminal is connected to the substrate, wherein the MEMS capacitive sensor is configured to generate a level of the output signal in dependence on the distance between the membrane and the backplate.