Semiconductor device

In an embodiment, a semiconductor device includes a semiconductor body having a field effect transistor device with an active region and an edge termination region that surrounds the active region on all sides. The active region includes a first serpentine trench in the semiconductor body, a first f...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Feil, Thomas, Wutte, Britta, Mirchandani, Ashita, Roesch, Maximilian
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:In an embodiment, a semiconductor device includes a semiconductor body having a field effect transistor device with an active region and an edge termination region that surrounds the active region on all sides. The active region includes a first serpentine trench in the semiconductor body, a first field plate in the first serpentine trench, a second serpentine trench in the semiconductor body, and a second field plate in the second serpentine trench. The first serpentine trench is separate and laterally spaced apart from the second serpentine trench.