Fluid control apparatus and method for attaching and detaching gas line section

A fluid control apparatus includes a gas line unit detachably attached to a frame. The gas line unit includes a line support member to which a fluid control device is attached. The frame includes: a first horizontal frame member; and a second horizontal frame member located below the first horizonta...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Matsuda, Takahiro, Saiki, Yuji, Unami, Hiroshi, Ochiishi, Masahiko
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A fluid control apparatus includes a gas line unit detachably attached to a frame. The gas line unit includes a line support member to which a fluid control device is attached. The frame includes: a first horizontal frame member; and a second horizontal frame member located below the first horizontal frame member. The first horizontal frame member includes: a hooking member extending in a left-right direction; and a lower portion which is located below the hooking member and in which a plurality of first grooves that are open to front are formed. The line support member includes: a device placement portion; and a pair of side plate portions protruding rearward from right and left edges of the device placement portion. Each of the side plate portions includes: a base portion located below the hooking member; and an upper portion located above the base portion and behind the hooking member.