Semiconductor devices including Si/Ge active regions with different Ge concentrations

In semiconductor devices, some active regions may frequently have to be formed on the basis of a silicon/germanium (Si/Ge) mixture in order to appropriately adjust transistor characteristics, for instance, for P-type transistors. To this end, the present disclosure provides manufacturing techniques...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Smith, Elliot John, Grasshoff, Gunter, Peters, Carsten
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In semiconductor devices, some active regions may frequently have to be formed on the basis of a silicon/germanium (Si/Ge) mixture in order to appropriately adjust transistor characteristics, for instance, for P-type transistors. To this end, the present disclosure provides manufacturing techniques and respective devices in which at least two different types of active regions, including Si/Ge material, may be provided with a high degree of compatibility with conventional process strategies. Due to the provision of different germanium concentrations, increased flexibility in adjusting characteristics of transistor elements that require Si/Ge material in their active regions may be achieved.