Method for conveying reaction tube unit

A method for conveying a reaction tube unit including a vertical reaction tube and a gas supply pipe provided at a distance from an inner wall of the vertical reaction tube along a longitudinal direction thereof, the method includes: arranging a buffer inside the reaction tube between the inner wall...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Takahashi, Michihiro, Yamanaka, Daisuke, Kobayashi, Masahiro, Hatakeyama, Tamotsu, Hasegawa, Harunari
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A method for conveying a reaction tube unit including a vertical reaction tube and a gas supply pipe provided at a distance from an inner wall of the vertical reaction tube along a longitudinal direction thereof, the method includes: arranging a buffer inside the reaction tube between the inner wall and the gas supply pipe to alleviate a collision; placing the reaction tube unit attached with the buffer on a carriage via a vibration isolator; and conveying the reaction tube unit by moving the carriage.