Method and apparatus for producing fused quartz from a polymerizable polyalkylsiloxane compound with membrane filter as cleaning device

A method for producing synthetic fused quartz is provided. The method includes evaporating a feedstock material which contains at least one polymerizable polyalkylsiloxane compound, and supplying the feedstock material vapor to a reaction zone, wherein the feedstock material vapor is converted by ox...

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Bibliographische Detailangaben
Hauptverfasser: Otto, Norbert, Trommer, Martin
Format: Patent
Sprache:eng
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Zusammenfassung:A method for producing synthetic fused quartz is provided. The method includes evaporating a feedstock material which contains at least one polymerizable polyalkylsiloxane compound, and supplying the feedstock material vapor to a reaction zone, wherein the feedstock material vapor is converted by oxidation and/or by hydrolysis into SiO2 particles. The feedstock material vapor is passed through a membrane filter as a cleaning device to reduce the formation of gel, which is typically associated with the production of synthetic fused quartz.