Laser system or laser exposure system

A laser exposure system may include a plurality of laser devices configured to output laser beams with which an irradiated subject is irradiated, and at least one beam property adjustment unit disposed on optical paths of the laser beams outputted from the plurality of laser devices, and configured...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Fujimoto, Junichi, Wakabayashi, Osamu, Kakizaki, Kouji
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A laser exposure system may include a plurality of laser devices configured to output laser beams with which an irradiated subject is irradiated, and at least one beam property adjustment unit disposed on optical paths of the laser beams outputted from the plurality of laser devices, and configured to allow beam properties of the laser beams to be approximately a same as each other.