Method and station for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substrates

Method and station for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substrates

A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at l...

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Hauptverfasser: Palisson, Julien, Le Guet, Catherine
Format: Patent
Sprache:eng
Schlagworte:
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SERVICING, CLEANING, REPAIRING, SUPPORTING, LIFTING, ORMANOEUVRING OF VEHICLES, NOT OTHERWISE PROVIDED FOR
TRANSPORTING
VEHICLES IN GENERAL
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creator Palisson, Julien
Le Guet, Catherine
description A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.
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subjects CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SERVICING, CLEANING, REPAIRING, SUPPORTING, LIFTING, ORMANOEUVRING OF VEHICLES, NOT OTHERWISE PROVIDED FOR
TRANSPORTING
VEHICLES IN GENERAL
title Method and station for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substrates
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