Method and station for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substrates

Method and station for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substrates

A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at l...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Palisson, Julien, Le Guet, Catherine
Format: Patent
Sprache:eng
Schlagworte:
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SERVICING, CLEANING, REPAIRING, SUPPORTING, LIFTING, ORMANOEUVRING OF VEHICLES, NOT OTHERWISE PROVIDED FOR
TRANSPORTING
VEHICLES IN GENERAL
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Beschreibung
Zusammenfassung:A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.