Distribution of damage volumes in laser-induced channels

A laser system is configured to produce a distribution of self-focus damage volumes through the thickness of a substrate. A laser of the laser system produces a laser beam, and an optical assembly receives the laser beam and emits a conditioned laser beam having a geometric focal region. Placing the...

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Bibliographische Detailangaben
Hauptverfasser: Geerlings, Kurtis L, Olesen, Niels A, Bareman, Donald L, Cammenga, David J, Luten, Henry A
Format: Patent
Sprache:eng
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Zusammenfassung:A laser system is configured to produce a distribution of self-focus damage volumes through the thickness of a substrate. A laser of the laser system produces a laser beam, and an optical assembly receives the laser beam and emits a conditioned laser beam having a geometric focal region. Placing the substrate in the path of the conditioned beam shifts the focal region to an effective focal region. The optical assembly and/or optical elements thereof can be configured such that the distribution of self-focus damage volumes is uniform over the thickness of the substrate by accounting for the non-linear effects of the substrate on the light that propagates through the substrate.