LED-based clean room lighting

A lighting device for room lighting in photolithography applications (in particular a retrofit lamp in sizes T5 and T8) comprises a light engine having a first light source which is configured to emit light in the wavelength range above approximately 500 nm and a second light source which is configu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Konrad, Armin, Koehler, Melanie
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMSTHEREOF HEATING INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21Sand F21V, RELATING TO THEFORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THELIGHT EMITTED LIGHT SOURCES NOT OTHERWISE PROVIDED FOR LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATINGELEMENTS LIGHTING MECHANICAL ENGINEERING NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHERARTICLES, NOT OTHERWISE PROVIDED FOR WEAPONS
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Beschreibung
Zusammenfassung:	A lighting device for room lighting in photolithography applications (in particular a retrofit lamp in sizes T5 and T8) comprises a light engine having a first light source which is configured to emit light in the wavelength range above approximately 500 nm and a second light source which is configured to emit light in a different wavelength range from the first light source. The first light source produces light in a spectral range within which photoresists used in photolithography are not sensitive. The second light source produces white light (either alone or in combination with the first light source).