Method and apparatus for purifying target material for EUV light source

A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure de...

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Bibliographische Detailangaben
Hauptverfasser:	Sams, Benjamin, Ridinger, Armin, Vaschenko, Georgiy, Rajyaguru, Chirag, Baumgart, Peter, Kardokus, Janine
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING CHEMISTRY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY FERROUS OR NON-FERROUS ALLOYS FURNACES FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL HEATING KILNS LIGHTING MECHANICAL ENGINEERING METALLURGY OPEN SINTERING OR LIKE APPARATUS OVENS PRETREATMENT OF RAW MATERIALS PRODUCTION AND REFINING OF METALS RETORTS TREATMENT OF ALLOYS OR NON-FERROUS METALS WEAPONS X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:	A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.