Method for producing deposition mask

A step of forming openings in a mask substrate includes step A of forming openings of "a" number of continual columns included in a first region (R1) including at least the (n/2)th column or the ((n+1)/2)th column; step B of forming openings of "b" number of continual columns inc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Sakio, Susumu, Kishimoto, Katsuhiko
Format: Patent
Sprache:eng
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