Pressure transducer and method for operating same
A pressure transducer for determining a pressure variable, comprising at least a pressure sensor with a measuring membrane and resistance elements integrated in the measuring membrane. The pressure sensor is arranged between a first and a second counter body, such that a pressure chamber forms betwe...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A pressure transducer for determining a pressure variable, comprising at least a pressure sensor with a measuring membrane and resistance elements integrated in the measuring membrane. The pressure sensor is arranged between a first and a second counter body, such that a pressure chamber forms between the measuring membrane and the first counter body, which pressure chamber can be subjected to a first pressure; wherein the side of the measuring membrane facing towards the second counter body can be subjected to a second pressure, and a displacement of the measuring membrane dependent upon the first and second pressures set. The pressure-dependent displacement of the measuring membrane can be detected by the resistance elements and, via a bridge voltage of a bridge circuit formed with the resistance elements, a pressure variable can be determined; wherein the measuring membrane has a membrane electrode and the second counter body has at least one counter body electrode on the side facing towards the measuring membrane, such that the membrane electrode and the counter body electrode form a capacitance, wherein, on the basis of the capacitance, at least one additional piece of information can be determined and/or at least one additional function of the pressure transducer can be performed. |
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