Work piece including a sacrificial cover layer for laser drilling substrates

A method for forming a plurality of precision holes in a substrate by drilling, including affixing a sacrificial cover layer to a surface of the substrate, positioning a laser beam in a predetermined location relative to the substrate and corresponding to a desired location of one of the plurality o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Piech, Garrett Andrew, Keech, John Tyler, Shustack, Paul John, Thomas, John Christopher, Shorey, Aric Bruce, Domey, Jeffrey John, Li, Xinghua
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A method for forming a plurality of precision holes in a substrate by drilling, including affixing a sacrificial cover layer to a surface of the substrate, positioning a laser beam in a predetermined location relative to the substrate and corresponding to a desired location of one of the plurality of precision holes, forming a through hole in the sacrificial cover layer by repeatedly pulsing a laser beam at the predetermined location, and pulsing the laser beam into the through hole formed in the sacrificial cover layer. A work piece having precision holes including a substrate having the precision holes formed therein, wherein a longitudinal axis of each precision hole extends in a thickness direction of the substrate, and a sacrificial cover layer detachably affixed to a surface of the substrate, such that the sacrificial cover layer reduces irregularities of the precision holes.