Method and station for measuring the contamination of a transport box for the atmospheric conveyance and storage of substrates

Method and station for measuring the contamination of a transport box for the atmospheric conveyance and storage of substrates

A method for measuring contamination of a transport box for atmospheric conveyance and storage of substrates is provided, the method including: measuring a concentration of at least one gaseous species inside the transport box by a measurement device including at least one gas analyzer and a measure...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Bounouar, Julien, Le-Barillec, Olivier
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:A method for measuring contamination of a transport box for atmospheric conveyance and storage of substrates is provided, the method including: measuring a concentration of at least one gaseous species inside the transport box by a measurement device including at least one gas analyzer and a measurement line connecting the at least one gas analyzer to an interface, the interface placing the measurement line in communication with an internal atmosphere of the transport box; and supplying a gas flow containing water vapor to the measurement device. There is also provided a station for measuring contamination of a transport box for atmospheric conveyance and storage of substrates.